Here we report the Si isotope compositions of four potential reference materials, including one fused quartz glass (Glass-Qtz), one natural quartz (Qinghu-Qtz), and two natural zircons (Qinghu-Zir and Penglai-Zir), suitable for in-situ Si isotopic microanalysis. Repeated SIMS (Secondary Ion Mass Spectrometry) analyses demonstrate that these materials are more homogeneous in Si isotopes (with the spot-to-spot uncertainty of 0.090-0.102‰), compared with the widely used NIST RM 8546 (previously NBS-28) quartz standard (with the spot-to-spot uncertainty poorer than 0.16‰). Based on the solution-MC-ICP-MS determination, the recommended ??30Si values are ?0.10 ± 0.04 ‰ (2SD), ?0.03 ± 0.05 ‰ (2SD), ?0.45 ± 0.06 ‰ (2SD), and ?0.34 ± 0.06 ‰ (2SD), for Glass-Qtz, Qinghu-Qtz, Qinghu-Zir, and Penglai-Zir, respectively. Our results reveal no detectable matrix effect on SIMS Si isotopic microanalysis between the fused quartz glass (Glass-Qtz) and natural quartz (Qinghu-Qtz) standards. Therefore, we propose that this synthetic quartz glass may be used as an alternative, more homogenous standard for SIMS Si isotopic microanalysis of natural quartz samples.