Space charge effects in the measurements by inductively coupled plasma mass spectrometry were investigated about groups 1, 2, and 13 of elements in the periodic table at various radio frequency (RF) power conditions and multiple extraction electrode-1 voltage conditions. Increased suppression of signal intensities was observed at an RF power over 1.1 kW with the increase of RF power, which was majorly attributed to space charge effects due to the increase in 40Ar+ density. A stronger negative extraction electrode-1 voltage resulted in stronger space charge effects. The extent of space charge effects decreased with the increase in mass-to-charge (m/z) ratio of the elements. The RF power at 0.8 kW to 0.9 kW can be a candidate condition for the measurements of elements with an m/z ratio under 100 at relatively higher sensitivity with much less space charge effects.